MSA-400 Micro System Analyzer

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•Brochure: MSA-400 Micro System Analyzer

The MSA-400 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler Vibrometry, Stroboscopic Video Microscopy and White Light Interferometry, the MSA-400 is designed with an all-in-one combination of technologies that clarifies real microstructural response and topography. Incorporated in the MEMS design and test cycle, the MSA-400 provides precise 3-D dynamic and static response data that simplifies troubleshooting, enhances and shortens design cycles, improves yield and performance, and reduces product cost.

The All-in-One Solution

Polytec's Award-Winning Micro System Analyzer

The MSA-400 Micro System Analyzer uses light for non-contact measurement of three-dimensional shape and motion in microstructures: laser-Doppler vibrometry for fast, broadband, out-of-plane dynamics; stroboscopic video microscopy for in-plane motion; and white light interferometry for high resolution topography. These technologies are integrated into a compact, robust and reliable all-in-one measurement head. This outstanding degree of innovation has been recognized by the 2005 Sensor Innovation Award, following the Photonics Circle of Excellence Award for the development of microscope scanning vibrometry.

Superior Dynamic Characterization Compared to Single Technology Solutions

The combination of two complementary measurement techniques for investigating the vibrational behavior of small structures provides superior performance. For example, it can quickly identify, visualize and measure system resonances and transient responses, enhancing overall measurement productivity. This improved efficiency is especially important when integrating the measurement system into automated processes for MEMS production environments. Single technology solutions like ESPI, white light interferometry, and phase shifting interferometry give a much more limited view of small structure response.

Finds All Mechanical Resonances Without A-Priori Information

Using wide-band excitation, the highly sensitive Laser-Doppler technique can rapidly find all mechanical resonances (in-plane and out-of-plane) without a-priori information. In a second step, the stroboscopic video microscopy technique is used to obtain accurate amplitude and phase information of in-plane resonances identified by laser vibrometry.

Convincing Benefits

• Rapid identification and visualization of both system resonances and static topography
  
• Integrated microscope optics with optimized optical path for best lateral resolution and highest image quality
  
• Easy integration with MEMS/wafer probe stations
  
• Simple and intuitive operation, measurement ready within minutes
  
• Increased productivity through short measurement cycle
  
• Accelerates product development, troubleshooting and time-to-market

Click Here To Download:
•Brochure: MSA-400 Micro System Analyzer